Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater

This paper reports a novel metal oxide nanowire (MOx NW) based gas senor built on a suspended carbon nanowire heater allowing ultra-low power consumption. This sensing platform was fabricated using only wafer level batch fabrication processes such as carbon-MEMS, atomic layer deposition, and hydrothermal growth processes. In addition, the suspended high-aspect-ratio geometry of the carbon nanowire enables MOx NWs to be heated with ultra-low power Joule heating