Polymer chip-integrable piezoelectric micropump with low backpressure dependence
- Conde, Alvaro José
- Bianchetti, Arturo Abel
- Veiras, Francisco Ezequiel
- Federico, Roque Alejandro
- Cabaleiro, Juan Martin
- Dufva, M.
- Madrid, Rossana Elena
- Fraigi, Liliana
DOIAbstract
We describe a piezoelectric micropump constructed in polymers with conventional machining methods. The micropump is self-contained and can be built as an independent device or as an on-chip module within laminated microfluidic chips. We demonstrate on-chip integrability by the fabrication and testing of an active micromixer with two pumps. Average flow rates from sub-ul/min to 300 ul/min can be obtained with low influence from the backpressure up to approximately 10 kPa. The micropump design allows potential use in low-cost disposable polymeric Lab on a Chip devices.Fil: Conde, Alvaro José. Instituto Nacional de Tecnología Industrial. Centro de Micro y Nanoelectrónica del Bicentenario; Argentina. Consejo Nacional de Investigaciones Científi...
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