Surface science of plasma-exposed surfaces and self-organization processes

This chapter contains sections titled: Synthesis of Self‐Organizing Arrays of Quantum Dots: Objectives and Approach Initial Stage of Ge/Si Nanodot Formation Using Nanocluster Fluxes Binary SixC1‐x Quantum Dot Systems: Initial Growth Stage Self‐Organization in Ge/Si Nanodot Arrays at Advanced Growth Stages Self‐Organized Nanodot Arrays: Plasma‐Specific Effects Concluding Remarks