SOI CMOS compatible low-power microheater optimization for the fabrication of smart gas sensors

In this paper, an original design of a polysilicon loop-shaped microheater on a 1-μm thin-stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation and very low power consumption (20 mW for heating at 400°C). Moreover, the use of completely CMOS compatible tetramethyl ammonium hydroxide-based bulk-micromachining techniques allows an easy, smart gas sensor integration in SOI-CMOS technology