Neutron and gamma radiation effects on MEMS structures

MEMS technology is expected to play a significant role in future space missions provided the effects of radiation on the reliability of MEMS devices is well understood [1]. Radiation induced dielectric charging has been identified as a mechanism which can potentially limit the reliability of electrostatically actuated MEMS devices [2]. The response of piezoresistive and PZT actuated MEMS was also found to change after exposure to different types of radiation [3]. It is however necessary to further investigate the effect of radiation and especially neutrons on the electromechanical properties of various materials that are used in microfabrication [4]. In this work we present results from mechanical and electrical tests on different materials before and after exposure to neutrons radiation