Effects of Key Parameters on the Performance of a New In-process Optical Measurement Method

A new in-process optical measurement method has been developed for measuring surface profiles of workpieces under the coolant condition. In this method, a laser beam passes through two additional layers. This paper presents an error analysis for the new method. The effects of key parameters on performance of the new method are examined. The theoretical analysis and experimental results show that the measurement error in this new method can be controlled within an acceptable range