Inductance properties of in-situ grown horizontally aligned carbon nanotubes

Kinetic inductance is an important property of carbon nanotube (CNT) in high frequency applications. However, disagreements exist in whether kinetic inductance of CNT is present in diffusive transport region. And till now, there is no systematic experimental study to verify the kinetic inductance theory due to the difficulties encountered in the fabrication of horizontal CNT arrays. In this thesis, we fabricated the horizontally aligned multi-walled nanotube (MWNT) arrays on silicon substrate. And we investigated the inductance properties of MWNT arrays with different length and width combinations. DC and radio frequency (RF) characterizations were conducted to extract the electrical parameters of CNT arrays. Statistical data processing was employed to explore the relationship between kinetic inductance and dimension of CNT arrays. We have experimentally validated that the value of kinetic inductance is proportional to the length of CNTs and inversely proportional to the number of CNTs in parallel. And we have concluded that kinetic inductance theory is applicable to CNT in diffusive transport region. This study could quell the existing disagreements about the kinetic inductance theory and provide insights to the potential applications of CNT as interconnect and on-chip inductor