An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port. (C) 1998 Elsevier Science S.A. All rights reserved