Polycrystalline silicon (poly-Si) thin films (approx.700nm) were deposited by LPCVD, doped with 950°C phosphorous diffusion, and rendered porous by anodization and stain etching. From x-ray photoelectron spectroscopy, poly-Si films have atomic concentration of C(1s):O(1s):Si(2p) = 6%:15%:79%. However, porous poly-Si (PPS) films with weak photoluminescence (PL) have C:O:Si of 20%:38%:42%. For PPS films with strong PL, C:O:Si is 11%:38%:51%. From micro-Raman, scattered spectra for 632nm laser source has peak at 735nm and full wave half maximum (FWHM) of 76nm, and is similar to the PL spectra excited by 400nm uv laser source. High resolution transmission electron microscopy (TEM) study shows that PPS film is of complex structure and composes o...
Polymorphous silicon (pm-Si:H) films have been prepared by a new regime of plasma enhanced chemical ...
We deposited polycrystalline silicon (poly-Si) thin films on commercial float glass by chemical vapo...
Spectroscopic ellipsometry in the mid infrared spectral range, Raman scattering and TEM measurement...
Light from porous silicon (Si) has been an intensive research topic since the report by Canham in 19...
This paper reports the surface electronic structure of light-emitting porous polycrystalline silicon...
The effect of etching conditions and x-ray diffraction (XRD) peaks to photoluminescence (PL) emissio...
Luminescent porous poly-Si films with large areas or micron-sized patterns have been obtained by ano...
In this study, porous silicon (PS) samples were prepared on n-type silicon (100) wafers by electroch...
We have prepared noncollapsed free-standing porous silicon (PS) films with various porosities even h...
We report Raman scattering and photoluminescence studies on porous silicon film formed on n-type sil...
Abstract. Raman scattering and photoluminescence (PL) measurements on (100) oriented n-type crystall...
Abstract. We investigated the optical properties of silicon clusters and Si nanocrystallites using p...
We have studied the microstructure and optical properties of free-standing porous Si thin films fabr...
We have obtained free-standing porous silicon films with porosity above 90% by using anodic oxidizin...
The work in this thesis concentrated on processing and diagnosing porous silicon nanocrystallites t...
Polymorphous silicon (pm-Si:H) films have been prepared by a new regime of plasma enhanced chemical ...
We deposited polycrystalline silicon (poly-Si) thin films on commercial float glass by chemical vapo...
Spectroscopic ellipsometry in the mid infrared spectral range, Raman scattering and TEM measurement...
Light from porous silicon (Si) has been an intensive research topic since the report by Canham in 19...
This paper reports the surface electronic structure of light-emitting porous polycrystalline silicon...
The effect of etching conditions and x-ray diffraction (XRD) peaks to photoluminescence (PL) emissio...
Luminescent porous poly-Si films with large areas or micron-sized patterns have been obtained by ano...
In this study, porous silicon (PS) samples were prepared on n-type silicon (100) wafers by electroch...
We have prepared noncollapsed free-standing porous silicon (PS) films with various porosities even h...
We report Raman scattering and photoluminescence studies on porous silicon film formed on n-type sil...
Abstract. Raman scattering and photoluminescence (PL) measurements on (100) oriented n-type crystall...
Abstract. We investigated the optical properties of silicon clusters and Si nanocrystallites using p...
We have studied the microstructure and optical properties of free-standing porous Si thin films fabr...
We have obtained free-standing porous silicon films with porosity above 90% by using anodic oxidizin...
The work in this thesis concentrated on processing and diagnosing porous silicon nanocrystallites t...
Polymorphous silicon (pm-Si:H) films have been prepared by a new regime of plasma enhanced chemical ...
We deposited polycrystalline silicon (poly-Si) thin films on commercial float glass by chemical vapo...
Spectroscopic ellipsometry in the mid infrared spectral range, Raman scattering and TEM measurement...