A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector means for independently intercepting electromagnetic radiation reflected from a sample frontside or backside, and methodology for pursuing less correlated determination of refractive index and thickness values
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A substantially self-contained “on-boar ” material system investigation system functionally mounted ...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector me...
A system and method of preventing substrate backside reflected components in a beam of electromagnet...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A substantially self-contained on-board material system investigation system for effecting relativ...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A substantially self-contained “on-boar ” material system investigation system functionally mounted ...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...
A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector me...
A system and method of preventing substrate backside reflected components in a beam of electromagnet...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A substantially self-contained on-board material system investigation system for effecting relativ...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellips...
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of w...
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a bea...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positio...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A substantially self-contained “on-boar ” material system investigation system functionally mounted ...
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromati...