Add to ORKGSytems and mehtods for providing and enhancing electromagnetic radiation beam radail energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
Sytems and mehtods for providing and enhancing electromagnetic radiation beam radail energy homogene...
A system for sequentially providing electromagnetic radia tion to a spot on a sample at different an...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a...
Disclosed are System and method for characterizing a System consisting of a fluid Sample on a two si...
A system and method of preventing substrate backside reflected components in a beam of electromagnet...
A substantially self-contained on-board material system investigation system for effecting relativ...
Disclosed are system and method for a characterizing system consisting of a fluid sample on a two-si...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...
Sytems and mehtods for providing and enhancing electromagnetic radiation beam radail energy homogene...
A system for sequentially providing electromagnetic radia tion to a spot on a sample at different an...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sa...
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a...
Disclosed are System and method for characterizing a System consisting of a fluid Sample on a two si...
A system and method of preventing substrate backside reflected components in a beam of electromagnet...
A substantially self-contained on-board material system investigation system for effecting relativ...
Disclosed are system and method for a characterizing system consisting of a fluid sample on a two-si...
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electr...
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-U...
The present invention relates to ellipsometer systems, and more particularly to ellipsometer systems...
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychr...
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which...