Structure and mechanical properties of diamond-like carbon (DLC) coatings doped with silicon

This paper reports the study of silicon-doped diamond-like carbon coatings a-C:H:Si prepared by Plasma-Assisted Chemical Vapour Deposition (PACVD) on 100Cr6 steel. Surface morphology and elemental composition were determined with the use of Scanning Electron Microscopy (SEM) / Energy Dispersive Spectroscopy (EDS). Surface topography measurements were performed using Atomic Force Microscopy (AFM). The scratch test assessment of the influence of a-C:H:Si coatings on mechanical properties was based on the measurements of nanohardness and adhesion to the substrate. The results show that silicon-doped diamond-like carbon coatings a-C:H:Si are characterized by a uniform surface structure, high hardness and good adhesion to the substrate