Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing

This work presents the fabrication, mechanical strength characterization, and cell culture demonstration of a high aspect ratio silicon carbide (SiC) membrane. Optimizations in the deposition and fabrication make an ultra-high aspect ratio up to 20,000 SiC membranes with high fracture strength possible. Utilizing the superior properties of SiC material, the ultra-thin SiC membrane is a promising for cell culture/stretching devices, enabling very short optical accesses. The biocompatibility of the SiC membrane was confirmed with the 3T3 fibroblasts cell viability rate of 92.7%, in which the cells flattened and elongated their morphology while maintaining a strong adhesion to the SiC surface