International audienceC-AFM and KPFM techniques have been applied to investigate advanced junctions that are currently involved in highly efficient silicon solar cells. Our first study focuses on silicon heterojunctions and notably hydrogenated amorphous silicon (a-Si:H)/crystalline silicon (c-Si) P/n or N/p heterostructures which band bending at the interface forms a 2D channel. This conductive channel was indeed evidenced for the first time by cross-sectional investigations by C-AFM confirming the analysis of macroscopic planar conductance measurements. A second example of nanoscale characterization concerns the passivating selective contacts consisting in a thin silicon oxide (SiOx) layer between the c-Si and a highly doped polysilicon (...