This paper describes the design and testing of the first miniaturised metallic triple-beam tuning fork resonant sensors for use in force, pressure and torque measurement applications. The new devices with 9mm length vibrating tines have resulted in over a 40% reduction in size when compared to previously tested resonators. The four fold increase in operating frequency to 26 kHz, with Q factors in air up to 4000, provides additional benefits for resolution, accuracy, range and overload capability. Measurement repeatability of at least 0.02% of span levels for torque transducers employing the sensors are quoted. Results of characterisation over the temperature range -30oC to +90oC are given
International audienceThe working principle of resonant force sensors with double ended tuning forks...
This thesis describes new ways of operating high-frequency nanomechanical resonators and using them ...
This thesis work provides an insight into the design of Force-amplifying Compliant Mechanisms (FaCMs...
This paper presents a double-ended tuning fork (DETF) force sensor with a resolution of 7nN and a ra...
A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements ...
With the increasing use of digital computers for data acquisition and digital process control, frequ...
A new torque transducer with high overload capability and direct frequency output is reported. It em...
We report the design and analysis of a serially coupled double microring resonator based force senso...
Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integr...
© 1992-2012 IEEE. This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems...
This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems (MEMS) resonant s...
This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the...
Micro-mechanical sensors are typically fabricated both in large numbers and economically using the p...
A joint Brunel-Southampton Universities’ research team has developed digital strain gauges based on ...
A proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled resonators was...
International audienceThe working principle of resonant force sensors with double ended tuning forks...
This thesis describes new ways of operating high-frequency nanomechanical resonators and using them ...
This thesis work provides an insight into the design of Force-amplifying Compliant Mechanisms (FaCMs...
This paper presents a double-ended tuning fork (DETF) force sensor with a resolution of 7nN and a ra...
A triple beam resonator fabricated in 430S17 stainless steel with thick-film piezoelectric elements ...
With the increasing use of digital computers for data acquisition and digital process control, frequ...
A new torque transducer with high overload capability and direct frequency output is reported. It em...
We report the design and analysis of a serially coupled double microring resonator based force senso...
Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integr...
© 1992-2012 IEEE. This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems...
This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems (MEMS) resonant s...
This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the...
Micro-mechanical sensors are typically fabricated both in large numbers and economically using the p...
A joint Brunel-Southampton Universities’ research team has developed digital strain gauges based on ...
A proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled resonators was...
International audienceThe working principle of resonant force sensors with double ended tuning forks...
This thesis describes new ways of operating high-frequency nanomechanical resonators and using them ...
This thesis work provides an insight into the design of Force-amplifying Compliant Mechanisms (FaCMs...