The INRIM 1D comparator with a new interferometric set-up for measurement of diameter gauges and linear artefacts

The INRIM 1D comparator was updated with a new interferometric set-up providing differential measurements of probe–sample displacements along the x-axis. In the proposed design, the measuring and reference beam paths fulfil the Abbe condition both in lateral and vertical alignment when probing the middle height section of the measuring gauge. Compensation of mechanical and thermal drifts was extended by using a symmetric and differential design of the optic paths. Significant improvements of the repeatability between series were demonstrated by internal comparisons with reference artefacts.article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements", Bern-Wabern (Switzerland), 04-06, October, 201