Circular Capacitance Micromachined Ultrasonic Transducer

Capacitance micromachined ultrasonic transducers (CMUTs) have become an attractive alternative to the piezoelectric transducers, especially in air-coupled nondestructive evaluation (NDE) and ultrasound medical imaging flow metering, micro/nanoelectronics, and industrial cleaning, etc. These are similar to other capacitance transducers as these employ a vibrating membrane to send and receive ultrasound in air and water. This paper describes the theory and design of a circular micromachined ultrasonic transducer which could lead to a CMUT with many advantages, including less loading effect. The software programs (Intellisuite 8.2 and MATLAB 7.0) were used to model a single cell of CMUT. The simulations-based studies of the critical parameters like collapse voltage and snapback voltage, which influence the operation of the CMUTs to a large extent, has been discussed. Small signal equivalent circuit model for the circular CMUT has been discussed and the program (SPICE) has been used for the simulation of the small signal equivalent circuit.Defence Science Journal, 2009, 59(6), pp.627-633, DOI:http://dx.doi.org/10.14429/dsj.59.156