Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics
- Edinger, P.
- Enando-Herranz, C.
- Takabayashi, A.Y.
- Sattari, H.
- Quack, N.
- Verheyen, P.
- Bogaerts, Wim
- Gylfason, K.B.
Publication date
January 2020
DOI Publisher
The Optical Society Language
EnglishAbstract
MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2 dB-IL MEMS devices, and demonstrate trade-offs for scalability. (C) 2020 The Author(s
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