The development of implantable microchip-integration technology and high-Q bio-compatible RF coils

[[abstract]]本子計畫預計開發與生物相容之無線傳輸線圈與系統晶片之整合，可以與皮膚貼合或植入人體中。當系統之太陽能電池或擷電裝置臨時無足夠之能量足以供系統使用時，可以使用生物相容之無線傳輸線圈，利用無線技術將能量與訊號自外界輸入，以維持系統之運作。在植入人體微系統之無線傳輸線圈開發上，利用UV雷射切割金箔，取代傳統之電子束沉積，以增加線圈厚度改善Q值，並求取最佳化之性能。在系統整合方面，開發以聚對二甲苯為材質之軟性基板，線圈與晶片間之接點沉積可生物相容之金質導線以連接各元件，將晶片與線圈整合至單一微系統中，使系統晶片與線圈整合，形成生物相容之系統，免去線圈與晶片間需打線連接，可將整個系統微小化與不受人體排斥。除了考慮系統性能優劣外，還須考慮材料對於人體之生物相容性，當整個植入人體之微系統製作完成後，將進行生物相容之測試，提升此生物相容之微系統之可靠度。[[abstract]]This sub-project is to develop the implantable bio-compatible system by integrating the RF coil and system chips, and it can attach to the skin or implant to human body. When the Intra-Body Communication System’s solar battery or energy harvesting device can not temporally get the enough energy to drive the whole system, the bio-compatible RF coil can get the energy and signals from outside to keep system working. In the development of high-Q RF coils, the UV laser is applied to cut the thick gold foil, replacing multiple E-beam metal deposition, and thus increases the Q-factor in order to get the better performance. In the integration of micro-implantable system, the implantable bio-compatible system employs the bio-compatible material-parylene and its fabrication process, creating the flexible bio-compatible circuit board, connecting the joints between coil and chips by depositing gold metal in order to integrate the coil and chips, preventing the traditional wire bonding, and thus minimize the whole system and form a bio-compatible system. Except for the consideration of performance, the concerns of bio-compatibility should be included. When the system is fabricated, the bio-compatible tests will be proceeded to evaluate and improve the reliability.[[note]]NSC100-2221-E327-009-MY