Development and Control of a Large-stroke Nano-precision Actuator Composed of a Linear Motor and an Impact Drive Mechanism

[[abstract]]本文研發之組合式驅動器，其特徵為利用脈衝驅動裝置之特性，控制給定之衝擊力，使其微動，進行精確定位。另外，結合線性馬達做長行程之驅動定位，以擴大作業範圍。此組合方式的驅動器，具有較低的製造成本、長行程高定位精度、可操作範圍廣，以及小型化等多項優點，以期轉移至國內產業界應用。 本文之主要成果為，以Hamilton原理為基礎，並考慮磁滯效應與摩擦力影響，重新架構壓電驅動平台之動態數學模型，並從所得之數學模型中，導入參數鑑別的概念，確立系統的等效運動方程式，並以前饋控制器加以補償其中非線性現象對脈衝驅動裝置的影響。再線性馬達控制方面，利用HP35670A動態訊號分析儀，鑑別出系統轉移函數，設計PI控制器達到 微米精度控制，最後將結合兩者驅動控制器，成為兩階段控制之長行程奈米級精度的定位系統。[[abstract]]The purpose of this study is to develop the combined Impact Drive Mechanism (IDM) - Linear Motor (LM) actuator with a dual-stage controller. The proposed actuator has precision positioning capacity causing by the given voltage featuring from the impact drive mechanism, as well as the large-stroke moving ability featuring from the linear motor. In this paper, we will first review the related technical documents, and second, we will design and create a small-scale actuator and a one-dimension experimental moving table, which is composed of an impact drive mechanism and a linear motor. Theoretically and technically, we will develop a broad and general control rule for the impact drive mechanism which is derived from the dynamic mathematical model based on Hamilton principle. Then, we will build the combined IDM-LM actuator and eventually design the controller based on the coupling effects of combining the two different actuators. In the end, a dual-stage system that has large-stroke and high precision positioning capacity will propose