Pneumatic Actuating Device with Nanopositioning Ability Utilizing Piezoelectric Impact Force

[[abstract]]本文針對氣壓驅動定位裝置，提出結合壓差及壓電衝擊力的創新驅動方式，使其達到兼具長行程驅動及奈米級定位的驅動能力。基本特性實驗得知，運用壓差-壓電微動式致動器的驅動方式，在精密定位階段可驅動移動檯往前或往後做精確的步幅微動。此外，為驗證其自動控制的定位能力，分別設計線上最佳化軌跡控制器及壓電衝擊力控制器，以驅使氣壓驅動定位裝置達到粗定位及精密定位的控制，實施目標位置設定為4 mm的自動控制實驗。實驗結果，藉由氣壓缸驅動的粗定位控制，移動檯在1.124秒達到0.74 µm的位置誤差，之後切換至由壓差-壓電微動式致動器驅動的精密定位控制模式，在1.032秒內達到10 nm等級的高精密位置誤差，全程的控制時間為2.2秒。以此驗證本文所提出之結合壓差及壓電衝擊力的方法，能有效提昇氣壓驅動定位裝置達到奈米等級，期望其在高精密工業上的廣泛應用。[[abstract]]This thesis is concerned with a new actuating method for a pneumatic positioning device coupled with a piezoelectric (PZT) impact force generator. Fundamental experiments showed that the sliding table could be actuated with precise step motions in both forward and backward directions by the actuations of PZT impact force incorporated with differential pressure. Furthermore, position control based on the hybrid-actuator was carried out. In order to verify the automatic positioning ability, a large travel range was operated by controlling the pneumatic actuator based on the on-line optimal tracking controller, and a high precision positioning ability was obtained due to impact force controller of piezoelectric actuator. The experimental result showed that the sliding table was successfully positioned from the reference origin to the target position of 4 mm in 1.124 s with the positioning accuracy of 0.74 μm due to the actuation of pneumatic cylinder, and the final positioning accuracy of 10 nm was obtained in 1.032 s by the actuations of PZT impact force with differential pressure. The total control time was 2.2 s. It was shown that the proposed method is capable of remarkably improving the positioning performance of pneumatic actuating device. It is expected that the proposed method will be widely applied in the precision industry using pneumatic cylinder