A pneumatic Positioning Device Coupled with Piezoelectric Self-moving Mechanism

[[abstract]]本文為解決氣壓缸不易達到高精密定位之缺點，提出創新性之氣壓缸驅動裝置。其構造乃在氣壓缸所驅動的移動檯上，加裝由壓電元件所構成之自走機構(Impact Drive Mechanism, IDM) 。其目的是當氣壓缸所驅動的移動檯達到長行程、快度的粗定位後，再利用自走機構的精確定位能力，達到次微米以下之高精密定位目標。由於自走機構之驅動原理，是利用壓電元件之高頻響應特性所產生的衝擊力，因而能克服滑動面上粘著－滑滯(Stick-Slip)的非線性摩擦現象，具有奈米定位能力。實驗結果，移動檯在100 mm之定位範圍內，藉由氣壓缸的驅動達到10 mm的粗定位精度，費時0.69 sec；再藉由自走機構的驅動達到10 nm之定位精度，費時0.925 sec。以此，確認此組合式之氣壓驅動裝置，具有高速、高精密的定位能力，期待在精密工業上的廣泛應用。[[abstract]]This Thesis reports about a new pneumatic positioning device coupled with a piezoelectric self-moving mechanism to overcome the main disadvantages of the inherent poor positioning accuracy obtained by traditional pneumatic cylinder. The new driving mechanism is to mount a piezoelectric Impact Drive Mechanism (IDM) to the controlled sliding table driven by the pneumatic cylinder. Based on the configuration, the first step of positioning process is to actuate the sliding table with rough position accuracy but with the benefits of high-speed and large-range due to the pneumatic cylinder. The second step is to drive the sliding table with high position accuracy by utilizing the impact force of IDM. The experimental results showed that the controlled sliding table was successfully positioned in 0.69 s with rough accuracy of 10 mm and with the stroke of 100 mm by utilizing the pneumatic cylinder, and the final positioning accuracy of 10 nm was obtained in 0.925 s due to the actuations of IDM. It is shown that the pneumatic positioning device coupled with IDM has attractive practical applications in the field of precision industry