A Study on Polyimide Process Improvement of Cell Form Defect for Liquid Crystal on Silicon Panel

[[abstract]]本研究以矽控液晶光閥顯示器產業為背景，以六標準差手法進行改善之個案研究。從2009年CES消費性電子大展及國內外知名的研究機構DIGITIMES、TSR針對微型投影技術應用產品之調查結果顯示，微型投影技術發展潛力十足，由此可知微型投影技術持續的開發與改良是勢在必行。為使矽控液晶光閥於微型投影技術佔有一席之地，本研究主要目的為配向膜塗覆製程薄化後缺陷之改善研究，以六標準差手法提升矽控液晶光閥之投影影像品質。 本研究依據六標準差管理手法之 DMAIC 改善程序，針對矽控液晶光閥配向膜塗覆製程之缺陷，以實驗設計法分析在不同製程條件下對細胞狀缺陷之影響，結果顯示透過本研究之階段程序，能有效改善配向膜塗覆製程所產生之細胞狀缺陷，良率由改善前的2.6%~11.8%大幅提升至70.3%~78.5%，而細胞狀缺陷完全地消失，影像品質得以提升。[[abstract]]This is a case study to use six sigma skills do improvements on the LCoS (Liquid Crystal on Silicon) display industry. According to CES (Consumer Electronics Show) on 2009 , domestic and foreign well-known research institution as digitimes and TSR(Techno System Research) reveal to the investigation result of the technical application products of mini-projection, the technological development potentiality of the miniature projection is great. Therefore can know development and improvement of mini-projection is lasting and necessary. In order to make famous in mini-projection technology for LCoS. And it is a study on polyimide process improvement of defect and improves the quality of the projection image for LCoS Panel. The six sigma had been proved by many researches and case studies as an effective skill for a project improvement. The research follows six sigma “DMAIC” procedure to use DOE(design of experiment) to analyze the defect of polyimide for LCoS. And it concludes through the procedure of the research, we can improve the defect of cell form for polyimide process and improves the quality of the projection image. Give the best parameters standardization and release to the procedure of manufacture, improves the cell form defect in an all-round way