Studies on the Static Fundamental Characteristics of a 2D Contact-type High-precision Measuring System

[[abstract]]本論文乃針對精密光學元件用之接觸式二維高精密量測系統進行規劃，並探討其靜態基本特性。該量測系統的組成包含雷射干涉儀、AC伺服馬達驅動之XY平臺、主動式壓電量測探頭、雷射光路，以及控制系統等。為獲得高性能及成本相對低廉的量測系統，乃以雙頻雷射干涉儀量測待測物之XY座標信號，經由特殊規劃之光路以避免阿貝量測誤差，並以主動式量測探頭精確控制量測力。在靜態基本特性的驗證上，包含XY平臺的移動特性、雷射量測系統之初始性能及誤差補償、特殊光路之有效性，以及量測探頭的靜態特性等。 本實驗系統裝置中，利用XY平臺結合主動式量測探頭構成一雙伺服系統，並針對高精度光學元件表面進行二維(2D)靜態量測，量測範圍1 mm內的最大誤差為0.413 μm，平均誤差為0.25 μm，初步驗證所規劃之光路的有效性，及系統架構的可行性，所探討的基礎靜態特性，可提供在建構動態掃描量測系統時之參考依據。[[abstract]]In this thesis, the configuration of a two-dimensional (2D) contact-type measuring system for the measurement of optical lens is described, and its static fundamental characteristics are studied. The measuring system is composed of a laser interferometry system, an XY stage driven by AC servo motors, an active piezoelectric measuring probe, laser optical path, and control system. For obtaining high performance of the measuring system with relatively low cost, a two-frequency laser interferometer is used to detect the XY position of a measured object, a special optical path is configured to reduce Abbe’s error, and an active probe is used to precisely control measuring force. On the performance verification of the static fundamental characteristics, it includes the motion characteristics of the XY stage, the original performance of the laser interferometer and its error compensation, the effectiveness of the optical path, and the static characteristics of the active probe. In this experimental system device, a dual-servo system is constructed from combining XY stage with the active measuring probe, and carry on the two-dimensional (2D) static measuring for the configuration of the optical lens, in the 1 mm range of measuring, the maximum error is 0.413 μm, the average error is 0.25 μm, the preliminary verification is the validity of special optical path, the feasibility of the system structure, and the fundamental static characteristics probed into, can be applied to the implementation of the dynamic scanning measuring system