Study on sputtering parameters of Zirconium Nitride on forged AZ31B magnesium alloy

[[abstract]]鎂合金材料具有質輕，高熱傳導性及抗電磁波等特性，是未來取代塑膠材質成為3C產品外殼件材料之一。目前其製造方式大都以壓鑄為主，但是當產品之厚度越薄時，產品不良率便大幅提升，造成成本過高。因此沖壓與鍛造製程，便開始漸漸地被廣泛應用。但不論是壓鑄或沖壓成形製程，均需後續之表面處理以解決耐蝕與美觀問題，傳統表面處理使用化成加考漆或電鍍方法均造成環境污染問題。 本研究之主要目的為利用直流非平衡磁控濺鍍製程，於鍛造鎂合金基材上沈積氮化鋯(ZrN)薄膜，以達到耐蝕、耐刮與美觀之目的。實驗首先以田口實驗計畫法，研究氮氣流量、基板偏壓、靶電流以及試片與靶面間之工作距離等參數對鍍膜色澤及光澤度之參數組合，再分別討論鍍膜時間、基板偏壓以及氮氣流量單一因素對氮化鋯薄膜色澤、光澤度、附著性及結構之影響。 實驗結果製程參數於Zr靶電流3A、氮氣流量7sccm、基板偏壓-150V、工作距離10cm時，顯示可得穩定ZrN薄膜金黃色澤，洛氏壓痕附著性為HF1。鍍膜結構及成分對顏色的影響也一併在文中討論。[[abstract]]Abstract The Magnesium Alloy possesses the high-thermal conductivity and anti-EMI capability. It would be widely used in outer case of 3C products and would substitute for plastics very soon. The main manufacturing process of Mg Alloy was by die casting traditionally. However, when the thickness of product is getting thinner, the failure rate will cause the cost higher. Thus, the new process such as stamping and forging are gradually considered. But both the die casting and new shaping process need post surface treatment to increase the anticorrosive capability and better-looking appearance. Traditional surface treatment adopts the conversion treatment by paint or electroplating which would cause the environmental pollution simultaneously. The main purpose of this research is to adopt unbalance magnetron process to sputter the ZrN film on forged Mg Alloy substrate. In this research we use Taguchi method to investigate the main parameters first. The parameters are including Nitrogen flow, substrate bias, target current, and working distance between substrate and object surface. Then we use the singe factor to study how substrate bias and Nitrogen flow will affect coating film. By experiments the adhesive capability ZrN film, we found the best parameters would be such as 3A in Zr target current, 7sccm in Nitrogen Flow,-150V for Substrate Bias, 10cm for working distance, which could get golden color and the Rockwell’s indenter Adherence by HF1. Moreover, we also discuss the effect of component to color and the deposition structure in this article