UV photon-counting CCD detectors that enable the next generation of UV spectroscopy missions: AR coatings that can achieve 80-90% QE

We describe recent progress in the development of anti-reflection coatings for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of coatings which are able to achieve greater than 50% QE in 4 bands from 130nm to greater than 300nm. We now present new refinements of these AR-coatings which will improve performance in a narrower bandpass by 50% over previous work. Successful test films have been made to optimize transmission at 190nm, reaching 80% potential transmission