Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated interferometers inside optical objectives. In Phase Shift Mode (PSM) [1], they can reach subnanometer vertical resolution but the lateral resolution, as any far-field optical system, is limited by diffraction to typically 0.5 um. They have a widespread use in microfabrication industries (microelectronics and MEMS)
THESIS 5321Optical surface metrology techniques offer many advantages over conventional methods. The...
Vertical scanning interferometers are routinely used for the measurement of optical fiber connectors...
As the dimensions of integrated circuits continue to decrease, new metrology tools that acan inspect...
Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated ...
We have made an interference optical microscope (IOM) capable of improved resolutions, both vertical...
Imaging interferometric microscopy (IIM) allows the acquisition of high-resolution im-ages using low...
We have made a Phase Shift Mode Interferometric Optical Microscope (PSM-IOM) operating in liquid and...
We have developed an interferometric optical microscope (IOM) in phase shift mode (PSM) compatible w...
Thesis (Ph. D.)--Harvard-MIT Division of Health Sciences and Technology, 2003.Includes bibliographic...
Optical coherence microscopy (OCM) is an interferometric technique providing 3D images of biological...
Optical coherence tomography (OCT) is an optical ranging technique analogous to radar — detection of...
Sensitivity of the amplitude and phasemeasurements in interferometric microscopy is influenced by fa...
State-of-the-art methods in high-resolution three-dimensional optical microscopy require that the fo...
The demand for surface metrology has been increasing over several decades, with industrial requireme...
State-of-the-art methods in high-resolution three-dimensional optical microscopy require that the fo...
THESIS 5321Optical surface metrology techniques offer many advantages over conventional methods. The...
Vertical scanning interferometers are routinely used for the measurement of optical fiber connectors...
As the dimensions of integrated circuits continue to decrease, new metrology tools that acan inspect...
Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated ...
We have made an interference optical microscope (IOM) capable of improved resolutions, both vertical...
Imaging interferometric microscopy (IIM) allows the acquisition of high-resolution im-ages using low...
We have made a Phase Shift Mode Interferometric Optical Microscope (PSM-IOM) operating in liquid and...
We have developed an interferometric optical microscope (IOM) in phase shift mode (PSM) compatible w...
Thesis (Ph. D.)--Harvard-MIT Division of Health Sciences and Technology, 2003.Includes bibliographic...
Optical coherence microscopy (OCM) is an interferometric technique providing 3D images of biological...
Optical coherence tomography (OCT) is an optical ranging technique analogous to radar — detection of...
Sensitivity of the amplitude and phasemeasurements in interferometric microscopy is influenced by fa...
State-of-the-art methods in high-resolution three-dimensional optical microscopy require that the fo...
The demand for surface metrology has been increasing over several decades, with industrial requireme...
State-of-the-art methods in high-resolution three-dimensional optical microscopy require that the fo...
THESIS 5321Optical surface metrology techniques offer many advantages over conventional methods. The...
Vertical scanning interferometers are routinely used for the measurement of optical fiber connectors...
As the dimensions of integrated circuits continue to decrease, new metrology tools that acan inspect...
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