Simultaneous Flow and Thermal Conductivity Sensing on a Single Chip Using Artificial Neural Networks

A thin-film CMOS MEMS thermal sensor has been designed, fabricated and tested with the addition of through-membrane isolating holes. These holes have been shown to enhance the discrimination towards gases with differing thermal conductivity in the presence of flow. Using three on-membrane resistors as inputs, linear statistical methods alongside Artificial Neural Network pattern recognition techniques have been investigated for decoupling the two parameters of thermal conductivity and flow rate using a single sensor. In addition to this, the addition of the membrane holes increases the sensitivity towards flow rate by 10 times and the sensitivity towards thermal conductivity by 2 times. This sensor design coupled with well-known post-processing techniques will enable a new generation of multi-parameter sensing solutions