SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness
ZnO thin film-based surface acoustic wave (SAW) devices were fabricated on Si, glass and polyimide (...
ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films wer...
Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ...
ZnO thin film-based surface acoustic wave (SAW) devices were fabricated on Si, glass and polyimide (...
Acoustic wave devices were fabricated incorporating ZnO films deposited using both a standard rf mag...
Surface acoustic wave (SAW) devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO) film...
[[abstract]]The propagation characteristics of surface acoustic wave for the ZnO piezoelectric films...
Recent developments on the preparation and application of ZnO films for acoustic wave-based microflu...
Lab-on-a-chip (LOC) is one of the most important microsystem applications with promise for use in mi...
Surface acoustic wave (SAW) devices were fabricated on Si to demonstrate functionality. Device desig...
Surface acoustic waves (SAW) on piezoelectric substrates find widespread application for high freque...
There are significant challenges in controlling uniformity of crystal inclination angles, growth ori...
There are significant challenges in controlling uniformity of crystal inclination angles, growth ori...
Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanoc...
This paper describes the novel nanocrystalline film ZnO surface acoustic wave devices, which demonst...
ZnO thin film-based surface acoustic wave (SAW) devices were fabricated on Si, glass and polyimide (...
ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films wer...
Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ...
ZnO thin film-based surface acoustic wave (SAW) devices were fabricated on Si, glass and polyimide (...
Acoustic wave devices were fabricated incorporating ZnO films deposited using both a standard rf mag...
Surface acoustic wave (SAW) devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO) film...
[[abstract]]The propagation characteristics of surface acoustic wave for the ZnO piezoelectric films...
Recent developments on the preparation and application of ZnO films for acoustic wave-based microflu...
Lab-on-a-chip (LOC) is one of the most important microsystem applications with promise for use in mi...
Surface acoustic wave (SAW) devices were fabricated on Si to demonstrate functionality. Device desig...
Surface acoustic waves (SAW) on piezoelectric substrates find widespread application for high freque...
There are significant challenges in controlling uniformity of crystal inclination angles, growth ori...
There are significant challenges in controlling uniformity of crystal inclination angles, growth ori...
Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanoc...
This paper describes the novel nanocrystalline film ZnO surface acoustic wave devices, which demonst...
ZnO thin film-based surface acoustic wave (SAW) devices were fabricated on Si, glass and polyimide (...
ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films wer...
Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ...