Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

It has been found that the phase with the fcc lattice of the NaCl structural type is formed due to the vacuumarc deposition of the nanostructured multicomponent (TiZrHfVNbTa)N coating. Implantation of negative Au– ions with a dose of 1 × 1017 cm–2 leads to the formation of a disordered polycrystalline struc ture without a preferred orientation of the fcc phase and nanocrystallites from 5–7 to 1–3 nm is size, which are dispersed in a layer up to 35 nm in depth. Nanohardness increases to 33 GPa, and the Vickers hardness reaches 51 GPa. Gold nanoclusters are formed in the nearsurface region, while the fcc lattice and the for mation of local Au regions are observed in the coating itself. Fragments with the hcp lattice are formed at depths above 180 nm because of the low nitrogen concentration