Add to ORKGThe paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications
Millimeterwave frequency range gained interest due to the demands on bandwidth and speed in telecomm...
Recent developments in micromachining techniques at the University of Michigan have resulted in nove...
International audienceA silicon micro-machined filter with a simple planar integration on an other s...
The paper presents a technology based on bulk and surface micromachining to manufacture lumped eleme...
This paper presents the fabrication processes for micromachined millimetre-wave devices, on two diff...
ABSTRACT: Recent developments in micromachining techniques at the University of Michigan have result...
A review of recent developments of membrane supported millimeter wave circuits based on GaAs microma...
This paper presents the design, fabrication and first experimental results of a dual-band switchable...
International audienceThis paper describes the design, manufacturing and experiments of a lumped ele...
This paper presents the design methodology for the micromachined circuits operating in the microwave...
This dissertation presents a comprehensive demonstration of the ability of membrane-supported transm...
In this paper, the technology for the realization of micromachined millimeter wave devices on dielec...
Abstract- This paper describes the design and the fabrication of a new type of millimeter-wave micro...
All microwave and millimeter-wave systems are made of monolithic microwave integrated circuits (MMIC...
International audienceThis paper presents a new technological process to implement efficient millime...
Millimeterwave frequency range gained interest due to the demands on bandwidth and speed in telecomm...
Recent developments in micromachining techniques at the University of Michigan have resulted in nove...
International audienceA silicon micro-machined filter with a simple planar integration on an other s...
The paper presents a technology based on bulk and surface micromachining to manufacture lumped eleme...
This paper presents the fabrication processes for micromachined millimetre-wave devices, on two diff...
ABSTRACT: Recent developments in micromachining techniques at the University of Michigan have result...
A review of recent developments of membrane supported millimeter wave circuits based on GaAs microma...
This paper presents the design, fabrication and first experimental results of a dual-band switchable...
International audienceThis paper describes the design, manufacturing and experiments of a lumped ele...
This paper presents the design methodology for the micromachined circuits operating in the microwave...
This dissertation presents a comprehensive demonstration of the ability of membrane-supported transm...
In this paper, the technology for the realization of micromachined millimeter wave devices on dielec...
Abstract- This paper describes the design and the fabrication of a new type of millimeter-wave micro...
All microwave and millimeter-wave systems are made of monolithic microwave integrated circuits (MMIC...
International audienceThis paper presents a new technological process to implement efficient millime...
Millimeterwave frequency range gained interest due to the demands on bandwidth and speed in telecomm...
Recent developments in micromachining techniques at the University of Michigan have resulted in nove...
International audienceA silicon micro-machined filter with a simple planar integration on an other s...