History of spectroscopy and modern micromachined disposable Si ATR-IR spectroscopy

In this article, the historical development of spectroscopy is examined and the spectroscopy devices used today are described. Then, we focus on infrared (IR) spectroscopy, which cannot give valuable signal in aqueous solution. Attenuated total reflection (ATR)-IR technique solves the problem. In addition, we specifically mention newly developed disposable ATR-IR crystals and micromachined silicon (Si) ATR-IR. Disposable crystal systems and microfluidics systems can be integrated with existing miniature ATR analyzers. If the integration is successful, the technique might be used in biomedical measuring instruments, reactions' analyses, and ultra-high-pressure analyses.TUBITAK (115E038