Fully integrated transducer platform with cavity optomechanical readout

  • Michels, Thomas
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Publication date
May 2020
Language
English

Abstract

Research and development of transducers based on cavity optomechanics is a topic of high interest particularly because these transducers enable measurement of mechanical motion down to the fundamental limit of precision imposed by quantum mechanics. The development of an on-chip cavity optomechanical transducer platform that combines high bandwidth and sensitivity near the standard quantum limit with compactness, robustness, small size, and potential for low cost batch fabrication inherent in MEMS is demonstrated as a proof of concept study. Design, fabrication and characterization of fully integrated and fiber pigtailed transducers is presented. The devices combine high sensitivity (0.14 - 40 fm·Hz^(-1/2), high bandwidth optomechanical rea...

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