An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material formed on the substrate under cryogenic conditions. The technique implies cooling the substrate below the condensation temperature of the gaseous precursor material, subsequently irradiating with ions according to the wanted pattern, and posteriorly heating the substrate above the condensation temperature. Here, using W(CO)6 as the precursor material, a Ga+ FIB, and a substrate temperature of -100 °C, W-C metallic layers and nanowires with resolution down to 38 nm have been grown by Cryogenic Focused Ion Beam Induced Deposition (Cryo-FIBID). The most important adv...
The implementation of three-dimensional (3D) nano-objects as building blocks for the next generation...
Focused Ion Beams are an important approach for nanostructure fabrication in the semiconductor indus...
Resumen del trabajo presentado a la 44th Micro and Nano Engineering Conference (MNE), celebrada en C...
An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies o...
[EN] The usage of focused beams of ions (FIBs) to induce the deposition of different materials repre...
The Focused Ion Beam Induced Deposition (FIBID) under cryogenic conditions (Cryo-FIBID) technique is...
This article belongs to the Special Issue Nanoscale Assembly and Integration for Applications.Focuse...
Emergent technologies are required in the field of nanoelectronics for improved contacts and interco...
Emergent technologies are required in the field of nanoelectronics for improved contacts and interco...
Emergent technologies are required in the field of nanoelectronics for improved contacts and interco...
In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID)...
Resumen del trabajo presentado a la 12th International Conference on Physics of Advanced Materials (...
Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposi...
Ga+ Focused Ion Beam Induced Deposition (FIBID) is a highly flexible, single-step nanopatterning tec...
This article belongs to the Special Issue Current Review in Synthesis, Interfaces, and Nanostructure...
The implementation of three-dimensional (3D) nano-objects as building blocks for the next generation...
Focused Ion Beams are an important approach for nanostructure fabrication in the semiconductor indus...
Resumen del trabajo presentado a la 44th Micro and Nano Engineering Conference (MNE), celebrada en C...
An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies o...
[EN] The usage of focused beams of ions (FIBs) to induce the deposition of different materials repre...
The Focused Ion Beam Induced Deposition (FIBID) under cryogenic conditions (Cryo-FIBID) technique is...
This article belongs to the Special Issue Nanoscale Assembly and Integration for Applications.Focuse...
Emergent technologies are required in the field of nanoelectronics for improved contacts and interco...
Emergent technologies are required in the field of nanoelectronics for improved contacts and interco...
Emergent technologies are required in the field of nanoelectronics for improved contacts and interco...
In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID)...
Resumen del trabajo presentado a la 12th International Conference on Physics of Advanced Materials (...
Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposi...
Ga+ Focused Ion Beam Induced Deposition (FIBID) is a highly flexible, single-step nanopatterning tec...
This article belongs to the Special Issue Current Review in Synthesis, Interfaces, and Nanostructure...
The implementation of three-dimensional (3D) nano-objects as building blocks for the next generation...
Focused Ion Beams are an important approach for nanostructure fabrication in the semiconductor indus...
Resumen del trabajo presentado a la 44th Micro and Nano Engineering Conference (MNE), celebrada en C...