In this work, the fabrication and characterization of a microdosimeter based on a synthetic single crystal diamond is reported. The microdosimeter is realized by means of both standard photolithography and selective chemical vapor deposition techniques to accurately define its micrometric sensitive volume. Experimental measurements were carried out at the Ruđer Bošković Institute microbeam facility using different particles such as proton, helium, lithium, carbon and oxygen. Ion beam induced charge (IBIC) technique was performed to characterize the microdosimeter response in terms of its charge collection properties. The experimental data were also analyzed by means of Geant4 Monte Carlo simulations. Diamond based microdosimeter shows a w...