Soft x-ray laser beamline for surface processing and damage studies

We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to the ablation study such as surface processing and damage formation. To get the correct irradiation energy/fluence, an intensity monitor composed of a Mo/Si multilayer beam splitter and an x-ray charge-coupled device camera has been installed in the beamline. Mo/Si multilayer beam splitter has a large polarization dependence in the reflectivity around the incident angle of 45 deg. However, by evaluating the relationship between reflectivity and transmittance of the beam splitter appropriately, the irradiation energy onto the sample surface can be derived from the energy acquired by the intensity monitor. This SXRL beamline is available to not only the ablation phenomena but also the performance evaluation of soft x-ray optics and resists