Organic nanostructure sensing layer developed by AAO template for the application in humidity sensors

The present study demonstrates a novel nanoporous structure of aluminium 1,8,15,22-tetrakis 29H,31H phthalocyanine chloride (AlPcCl) prepared by template-assisted method for a humidity sensor. The nanoporous sensing layer was fabricated by solution wetting of anodic aluminium oxide template. The solutions of AlPcCl in different concentrations were spun cast over the template at various speeds. Both capacitive and resistive responses were measured as a function of different relative humidity levels. The sensor showed wide operating relative humidity range and responded at quite low humidity levels. Morphological changes were investigated by field emission scanning electron microscopy. The sensor showed wide operating relative humidity range. The sensor demonstrated better performance with improved sensing parameters, highlighting unique advantages of the low-molecular nanostructured sensing layer for the humidity sensors.We acknowledge the University of Malaya for project funding under the University Malaya Research Grant (RP026C-15AFR) and Ministry of Education Malaysia for project funding under the Fundamental Research Grant Scheme (FP046-2015A). This research was financially supported by Hibah Penelitian Dasar Unggulan Perguruan Tinggi No. 385/UN2.R3.1/HKP05.00/2018 from Ministry of Research, Technology and Higher Education Republic of Indonesia.Scopu