Asperity heating for repair of metal contact RF-MEMS switches

Jensen, Brian D.
Huang, Kuangwei
Chow, Linda L. W.
Saitou, Kazuhiro
Volakis John L.
Kurabayashi, Katsuo

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Publication date

June 2004

DOI

10.1109/MWSYM.2004.1338989

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Journal

issn:0149-645X

Language

English

Abstract

We have experimentally observed the failure of metal contact RF MEMS switches due to a rapid rise in contact resistance during switching. We were able to repair the failed switches through heating the contact asperities by applying sufficient contact voltage. The data suggest the hypothesis that increasing contact resistance is caused by strain hardening of the contact surface. With this understanding, appropriate corrective measures can be taken to overcome failure, and suggestions for doing so are given in the paper.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/87250/4/Saitou87.pd

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Asperity heating for repair of metal contact RF-MEMS switches

Abstract

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Asperity heating for repair of metal contact RF-MEMS switches

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