Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/76702/1/AIAA-1999-520-510.pd
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
We present four new findings pertaining to MEMS sensors for acoustic emission detection. Our sensors...
Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/76479/1/AIAA-2000-546-400.pd
Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/77250/1/AIAA-1999-1992-533.pd
A novel pressure measurement technique is presented for wireless recording of time-averaged surface ...
The purpose of this research is to develop MEMS based acoustic emission sensors for structural healt...
Issued as final reportMEMS sensors for the non-contact ultrasonic monitoring of gas turbine engine c...
The goal of this research is to improve the structure and dimension of the MEMS acoustic em...
MEMS piezoresistive sound detectors have been fabricated using the dissolved wafer process for the f...
This paper reports finite element model (FEM) simulation and fabrication of a square shaped diaphrag...
L’aéroacoustique est une filière de l'acoustique qui étudie la génération de bruit par un mouvement ...
The second stage of the design, fabrication, and characterization of a surface micro-machined, front...
A Microelectromechanical (MEMS) pressure sensor was designed, fabricated, and tested. Photomasks wer...
Preparing and pre-testing experimental setups for flight tests is a lengthy but necessary task. One ...
Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes excee...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
We present four new findings pertaining to MEMS sensors for acoustic emission detection. Our sensors...
Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/76479/1/AIAA-2000-546-400.pd
Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/77250/1/AIAA-1999-1992-533.pd
A novel pressure measurement technique is presented for wireless recording of time-averaged surface ...
The purpose of this research is to develop MEMS based acoustic emission sensors for structural healt...
Issued as final reportMEMS sensors for the non-contact ultrasonic monitoring of gas turbine engine c...
The goal of this research is to improve the structure and dimension of the MEMS acoustic em...
MEMS piezoresistive sound detectors have been fabricated using the dissolved wafer process for the f...
This paper reports finite element model (FEM) simulation and fabrication of a square shaped diaphrag...
L’aéroacoustique est une filière de l'acoustique qui étudie la génération de bruit par un mouvement ...
The second stage of the design, fabrication, and characterization of a surface micro-machined, front...
A Microelectromechanical (MEMS) pressure sensor was designed, fabricated, and tested. Photomasks wer...
Preparing and pre-testing experimental setups for flight tests is a lengthy but necessary task. One ...
Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes excee...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
We present four new findings pertaining to MEMS sensors for acoustic emission detection. Our sensors...
Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/76479/1/AIAA-2000-546-400.pd
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