We report the growth of cubic boron nitride (cBN) films by magnetron sputtering on Si (100) substrates. The films are grown in the presence of negative substrate bias voltages and a nitrogen plasma produced by an electron cyclotron resonance source. We find evidence for a sharp low‐voltage threshold in the substrate bias (−105 V) beyond which the samples are predominantly cBN. The structural quality of the cBN films is optimized in a narrow range of voltages near this threshold. We discuss the important role of energetic ions in the formation of cBN in light of recent theoretical findings.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/70509/2/APPLAB-64-14-1859-1.pd
Cubic boron nitride (cBN) films were prepared by reactive r.f. sputtering in an Ar–N₂ discharge usin...
This paper deals with the successful preparation of cubic boron nitride (c-BN) films by use of an el...
Cubic boron nitride (cBN) thin films were grown on Si(100) and high-speed steel substrates by reacti...
We have grown cubic boron nitride (c-BN) films on silicon (100) substrates by rf magnetron sputter d...
This dissertation details significant advances in the thin film growth of the wide bandgap semicondu...
We report results on an improved growth process for cubic boron nitride (c-BN) films. The films are ...
This thesis details the growth mechanisms and deposition processes for semiconducting cubic boron ni...
We report results from cathodoluminescence spectroscopy of boron nitride films grown on Si(100) subs...
We report evidence for oriented growth of pure-phase cubic boron nitride on silicon (100) substrates...
PVD sputter deposition of cubic boron nitride (cBN) on Si(001) has been carried out using electrical...
Boron nitride thin films have been deposited on silicon by tuned substrate r.f. magnetron sputtering...
c-BN(cubic boron nitride) is known to have extremely high hardness next to diamond, as well as very ...
The goal of our work was to develop d.c. magnetron sputter process for the c-BN deposition. For the ...
A novel method for generating boron nitride thin films is currently being developed. This method uti...
Nanocrystalline cubic boron nitride and boron carbide films have been synthesized using sputtering. ...
Cubic boron nitride (cBN) films were prepared by reactive r.f. sputtering in an Ar–N₂ discharge usin...
This paper deals with the successful preparation of cubic boron nitride (c-BN) films by use of an el...
Cubic boron nitride (cBN) thin films were grown on Si(100) and high-speed steel substrates by reacti...
We have grown cubic boron nitride (c-BN) films on silicon (100) substrates by rf magnetron sputter d...
This dissertation details significant advances in the thin film growth of the wide bandgap semicondu...
We report results on an improved growth process for cubic boron nitride (c-BN) films. The films are ...
This thesis details the growth mechanisms and deposition processes for semiconducting cubic boron ni...
We report results from cathodoluminescence spectroscopy of boron nitride films grown on Si(100) subs...
We report evidence for oriented growth of pure-phase cubic boron nitride on silicon (100) substrates...
PVD sputter deposition of cubic boron nitride (cBN) on Si(001) has been carried out using electrical...
Boron nitride thin films have been deposited on silicon by tuned substrate r.f. magnetron sputtering...
c-BN(cubic boron nitride) is known to have extremely high hardness next to diamond, as well as very ...
The goal of our work was to develop d.c. magnetron sputter process for the c-BN deposition. For the ...
A novel method for generating boron nitride thin films is currently being developed. This method uti...
Nanocrystalline cubic boron nitride and boron carbide films have been synthesized using sputtering. ...
Cubic boron nitride (cBN) films were prepared by reactive r.f. sputtering in an Ar–N₂ discharge usin...
This paper deals with the successful preparation of cubic boron nitride (c-BN) films by use of an el...
Cubic boron nitride (cBN) thin films were grown on Si(100) and high-speed steel substrates by reacti...