Stress determination of micromembranes using laser vibrometry

A laser vibrometry based dynamic technique for biaxial residual stress determination in micromembranes is reported. Layered, low pressure chemical vapor deposition grown, rectangular shaped micromembranes are ultrasonically excited. The resulting micromembrane displacement, as a function of frequency and position, is recorded to yield resonance frequencies and associated vibrational mode numbers. The stress is determined from this information. Vibrations forced from ultrasonic pressure (∼25 Pa) resulted in peak displacements of tens of nanometers at resonance. For the sample set studied, the (3,1) mode resonance peak displayed the least damping in atmospheric testing and was used to establish stress levels ∼108 N/m2. A trend for this stress showing an overall decrease by ∼40% as a result of thermomechanical cycling was identified. © 1996 American Institute of Physics.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/69590/2/RSINAK-67-5-1965-1.pd