Micro- and nano-link ultra-low power heaters for sensors
- Groenland, A.W.
- Vereshchagina, E.
- Kovalgin, A.Y.
- Wolters, R.A.M.
- Gardeniers, J.G.E.
- Schmitz, J.
Publication date
January 2012
DOI Publisher
IEEE Solid-State Circuits SocietyAbstract
A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 �C is achieved at a power consumption of only 5.5 ?W, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds
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