A combination of silicon anisotropic etch and mechanical hot embossing techniques is used to demonstrate the feasibility of manufacturing plastic micropyramids. These micropyramids have the desirable optical characteristics to enhance the brightness of LCD (liquid crystal displays) in battery-powered laptop computers, personal TVs and camcorders. Silicon mold inserts, 4-inch in diameter, are first micromachined and used directly in the micro hot embossing process by applying plastic sheets made of polymethyl methacrylate (PMMA) or polyvinyl chloride (PVC). Micropyramids which have base widths of 30 µm, heights of 21 µm and apex angles of 70° are hot embossed on the surface of plastic sheets. The fabricated plastic films are tes...
Corrugation of silicon surfaces is desired for a variety of applications requiring availability of i...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Micro embossing is the process of fabricating micron-sized features by plastic deformation of a work...
Hot embossed microstructures fabricated by laboratory and commercial environments have been studied...
With advancement in technology, many devices are now made smaller, more efficient and yet remain cos...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
This paper reports on a process to create microlenses characterized by unconventional footprints, sp...
This paper reports an innovative method for fabrication of plastic microlens arrays. By using gas pr...
Photo-embossing has been developed as a convenient and economical method for creating complex surfac...
This paper describes a promising fabrication technique for rapid replication of high aspect ratio mi...
The paper deals with the development of silicon tools and an appropriate hot embossing technology fo...
Plastic microchips with microchannels (100 μm wide, 40 μm deep) of varying designs have been fabrica...
In the manufacturing of microfluidic devices, the micro-molds will not only affect the overall manuf...
Abstract— A promising technique for the large-scale manufacture of micro-fluidic devices and photoni...
Polymer-based holographic and diffractive optical elements have gained increasing interest due to th...
Corrugation of silicon surfaces is desired for a variety of applications requiring availability of i...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Micro embossing is the process of fabricating micron-sized features by plastic deformation of a work...
Hot embossed microstructures fabricated by laboratory and commercial environments have been studied...
With advancement in technology, many devices are now made smaller, more efficient and yet remain cos...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
This paper reports on a process to create microlenses characterized by unconventional footprints, sp...
This paper reports an innovative method for fabrication of plastic microlens arrays. By using gas pr...
Photo-embossing has been developed as a convenient and economical method for creating complex surfac...
This paper describes a promising fabrication technique for rapid replication of high aspect ratio mi...
The paper deals with the development of silicon tools and an appropriate hot embossing technology fo...
Plastic microchips with microchannels (100 μm wide, 40 μm deep) of varying designs have been fabrica...
In the manufacturing of microfluidic devices, the micro-molds will not only affect the overall manuf...
Abstract— A promising technique for the large-scale manufacture of micro-fluidic devices and photoni...
Polymer-based holographic and diffractive optical elements have gained increasing interest due to th...
Corrugation of silicon surfaces is desired for a variety of applications requiring availability of i...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Micro embossing is the process of fabricating micron-sized features by plastic deformation of a work...