Review of optical techniques for three dimensional surface measurement and development of a new measurement system

Optical measurement techniques for high precision three-dimensional form measurement are reviewed. The systems investigated include interferometry, auto focus techniques and triangulation systems. The configurations of these instruments and their methods of operation are described. Optical based systems have a number of limitations when applied to high precision measurement of curved surfaces. The performance of these systems are discussed and assessed. A recommended system for three-dimensional form measurement is described