The ATLAS Experiment is one of the four large detectors located at the Large Hadron Collider (LHC) at CERN in Geneva, Switzerland. In summer 2008, ATLAS is expected to start collecting data from proton-proton collisions at 14 TeV centre-of-mass energy. In the centre of the detector, the reconstruction of charged particle tracks is performed by silicon and drift tube based sub-detectors. In order to achieve the ATLAS physics goals the resolutions of the measured track parameters should not be degraded by more than 20% due to misalignment. Thus, the relative positions of the silicon detector elements have to be known to an accuracy of about 10 micrometers in the coordinate with the best measurement precision. This requirement can be achieved ...