Treatment uniformity of plasma immersion ion implantation studied with three- dimensional model systems

Ensinger, Wolfgang

Publication date

January 1998

Abstract

Treatment uniformity of plasma immersion ion implantation studied with three- dimensional model systems / W. Ensinger ... - In: Surface and coatings technology. 103/104. 1998. S. 218-22

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Treatment uniformity of plasma immersion ion implantation studied with three- dimensional model systems

Abstract

Extracted data

Treatment uniformity of plasma immersion ion implantation studied with three- dimensional model systems

Abstract

Extracted data

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