The compilation and diagnosis of the device for the deposition of titan-oxide lays

This diploma thesis describes compilation of device for deposition of thin-walled lays a diagnosis of some its parts. In the beginning part this thesis are given reason needs using plasma processes in the industry. Next capture describes main parts different kinds of discharges. Practical part is made of describing of particular components of device, instalation and conditions of their activation. At the last part of thesis we make classification of experimental dates due to statistic methods to better describing of the specific parts of the device