Výpočty nízkonapěťového BSE detektoru

The scintillator-photomultiplier detection system installed under the pole piece represents the most efficient BSE detector in SEM. However, the initial energy of the BSEs of 0.5-3 keV in the LV SEM is the energy, on which the light yield of scintillators decreases. Appropriate acceleration of BSEs and declination of SEs is necessary for the best BSE image at low acceleration voltage. Electrostatic field affecting signal electron trajectories was simulated in the software package Simion 3D