Elektrostatický nízkoenergiový rastrovací elektronový mikroskop pro Augerovu analýzu

A scanning low energy electron microscope (SLEEM) was realized with a cathode lens in which the negatively biased specimen is used as the cathode. In this arrangement, electrons pass through the microscope at high energy and are decelerated to low energy before landing on the sample. This design brings plenty of signal even in the landing energy range of tens or units of eV. However, the use of the primary electrons with low energy brings some problems e.g. low source brightness, increased aberrations and sensitivity to stray fields. The scanning Auger microscopy (SAM) is well-established experimental method. A combination of SAM and SLEEM in one device would therefore provide a sufficient tool to solve the problems inherent in these individual methods. Although much has already been achieved in the area of detection of slow electrons, none of the methods currently known is suitable to be built into a scanning illumination column for Auger microprobe analysi