Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO<sub>3</sub> single crystals

Sones, C.L.
Mailis, Sakellaris
Apostolopoulos, V.
Barry, I.E.
Gawith, C.B.E.
Smith, Peter G.R.
Eason, R.W.

Publication date

January 2002

DOI

10.1088/0960-1317/12/1/308

Publisher

IOP Publishing

Abstract

We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photolithographic patterning, electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50µm × 50µm × 5 mm in the x, z and y crystallographic directions, respectively, have been fabricated

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Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO<sub>3</sub> single crystals

Abstract

Extracted data

Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO<sub>3</sub> single crystals

Abstract

Extracted data

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